Product description
Applied Materials 0040-87358 bellows SV door with ball bearing, Rev 04 appearing in some descriptions.
Specifications and identifiers
supported details
| Description | Bellows SV door with ball bearing Repeated core identity. |
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| Valve context | SV / slit valve door SV likely refers to slit valve in this context. |
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| Revision | Rev 04 appears in some descriptions Revision should be verified. |
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Applications
chamber hardwarewafer handlingvacuum hardwareprocess module maintenanceSlit-valve door or actuator service.Vacuum transfer module maintenance where bellows/door assembly matches.
How it works
A slit-valve door bellows assembly used as a fitted mechanical part in a semiconductor process tool or wafer-handling subsystem.
Mechanical chamber parts must match dimensions, mounting features, material/coating, and process exposure requirements.
Technical guide
- Bellows
- flexible sealed component allowing motion while maintaining vacuum separation
- SV
- slit valve in this context
What to verify before purchase
- Confirm revision and whether the assembly includes bearings, door hardware, or bellows only.
- Check bellows condition, sealing surfaces, and particle cleanliness.
Confirm with the seller
- Exact tool compatibility beyond the supported platform or description is not confirmed.
- Condition, calibration state, and service history are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.