AMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard DiffuserAMAT 0040-94482 Chamber Door Lid Guard & Mykrolis WG3D401R2 Chambergard Diffuser
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APPLIED MATERIALS 0040-94482

Chamber Door Lid Guard with Chambergard Diffuser

Market Availability & Pricing

Part number0040-94482
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Mechanical › Chamber Components › Chamber Covers
Chamber Door Lid Guard with Chambergard Diffuser
APPLIED MATERIALS0040-94482Chamber door lid guard
Product description
Chamber door lid guard associated with a Mykrolis WG3D401R2 Chambergard diffuser.
Specifications and identifiers
identification
ItemChamber door lid guard
Mechanical guard or cover component around a chamber door/lid area.
Associated diffuserMykrolis WG3D401R2 Chambergard diffuser
Associated component/vendor reference is referenced in the item description; verify whether it is included.
Applications
process chamber hardwarewafer handling assembliesvacuum and gas delivery hardwarechamber door/lid guardingdiffuser-associated chamber hardware
How it works

A machined or formed mechanical component provides structure, spacing, sealing, shielding, or positioning in a semiconductor process module.

Geometry, material, surface finish, and cleanliness strongly affect fit, particle performance, and process compatibility.

Technical guide
ID
Inside diameter.
OD
Outside diameter.
Rev
Revision; an engineering change level that may affect fit or compatibility.
What to verify before purchase
  • Verify whether the Mykrolis WG3D401R2 diffuser is included or only referenced.
  • Confirm fit, mounting points, and chamber/tool context.
Confirm with the seller
  • Exact chamber model and material.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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