Product description
Direct-cooled chamber liner, Y2O3 / oxalic wording, 300 mm EMAX, Applied Materials 0041-05536.
Specifications and identifiers
identification
| Supported item noun | Chamber liner |
|---|
| Cooling/context | Direct cooled |
|---|
| Material/coating wording | Y2O3 / oxalic |
|---|
platform context
| Tool context | 300 mm EMAX |
|---|
| Refurb/alternate reference | 0041-05536R appears in evidence Likely refurb/reworked variant notation; verify before treating as equivalent. |
|---|
Equipment context
- Applied Materials 300 mm EMAX
Applications
etch or plasma process chambers300 mm EMAX tool modulesdirect-cooled chamber hardwareDirect-cooled chamber liner replacementPlasma chamber wall protection300 mm EMAX chamber maintenance
How it works
A chamber liner protects chamber walls and process surfaces from plasma, deposition, etch byproducts, and contamination.
Liner material, coating, cooling design, cleaned/refurbished condition, and exact platform fit affect process performance and particle control.
Technical guide
Y2O3
Yttrium oxide/yttria wording indicates a material or coating context; exact coating/process should be verified.
oxalic
Likely a treatment or process descriptor in the part wording; exact meaning should be confirmed by documentation.
direct_cooled_liner
A cooled liner helps manage thermal load and process stability in high-energy chamber environments.
- EMAX
- Applied Materials platform/process-module wording; exact model/configuration should be verified.
What to verify before purchase
- Verify coating/material, cooling passages, cleaned/refurbished certification, revision, and exact EMAX chamber compatibility.
- Confirm whether 0041-05536R is acceptable as a replacement for 0041-05536.
Confirm with the seller
- Exact coating process, cooling-interface details, and refurb equivalency are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.