0041-05536 / LINER CHAMBER DIRECT COOLED, Y2O3 OXALIC, 300MM EMAX / AMATApplied Materials 0041-05536 LINER,CHAMBER,Y203-OXALIC 300MM EMAX AMATAMAT 0041-05536 CHAMBER LINER CT, USED CLEANEDAMAT APPLIED MATERIALS 0041-05536 CHAMBER LINER Y203 - OXALIC 0041-05536RApplied Materials 0041-05536 LINER,CHAMBER,Y203-OXALIC 300MM EMAX AMATAMAT 0041-05536 CHAMBER LINER Y2O3 DIRECT COOLED EMAX 300MMAMAT 0041-05536 CHAMBER LINER Y2O3 DIRECT COOLED EMAX 300MMApplied Materials 0041-05536 LINER,CHAMBER,Y203-OXALIC 300MM EMAX AMAT* Refurb* Applied Materials 0041-05536 0041-05536R Direct Cooled Liner +WarrantyLiner chamber Direct Cooled, Y2O3 oxalic, 300mm EMAX 0041-05536 AMATAMAT 0041-05536  liner chamber, Y2O3 oxalic, 300mm EMAX
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APPLIED MATERIALS 0041-05536

300 mm EMAX Direct-Cooled Y2O3 Chamber Liner

Market Availability & Pricing

Part number0041-05536
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales575 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Chamber Liners
300 mm EMAX Direct-Cooled Y2O3 Chamber Liner
APPLIED MATERIALS0041-05536direct-cooled chamber liner
Product description
Direct-cooled chamber liner, Y2O3 / oxalic wording, 300 mm EMAX, Applied Materials 0041-05536.
Specifications and identifiers
identification
Supported item nounChamber liner
Cooling/contextDirect cooled
Material/coating wordingY2O3 / oxalic
platform context
Tool context300 mm EMAX
Refurb/alternate reference0041-05536R appears in evidence
Likely refurb/reworked variant notation; verify before treating as equivalent.
Equipment context
  • Applied Materials 300 mm EMAX
Applications
etch or plasma process chambers300 mm EMAX tool modulesdirect-cooled chamber hardwareDirect-cooled chamber liner replacementPlasma chamber wall protection300 mm EMAX chamber maintenance
How it works

A chamber liner protects chamber walls and process surfaces from plasma, deposition, etch byproducts, and contamination.

Liner material, coating, cooling design, cleaned/refurbished condition, and exact platform fit affect process performance and particle control.

Technical guide
Y2O3

Yttrium oxide/yttria wording indicates a material or coating context; exact coating/process should be verified.

oxalic

Likely a treatment or process descriptor in the part wording; exact meaning should be confirmed by documentation.

direct_cooled_liner

A cooled liner helps manage thermal load and process stability in high-energy chamber environments.

EMAX
Applied Materials platform/process-module wording; exact model/configuration should be verified.
What to verify before purchase
  • Verify coating/material, cooling passages, cleaned/refurbished certification, revision, and exact EMAX chamber compatibility.
  • Confirm whether 0041-05536R is acceptable as a replacement for 0041-05536.
Confirm with the seller
  • Exact coating process, cooling-interface details, and refurb equivalency are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0041-05536 / LINER CHAMBER DIRECT COOLED, Y2O3 OXALIC, 300MM EMAX / AMAT

0041-05536 / LINER CHAMBER DIRECT COOLED, Y2O3 OXALIC, 300MM EMAX / AMAT

USD 7899.7500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 24, 2025 18:00 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0041-05536 LINER,CHAMBER,Y203-OXALIC 300MM EMAX AMAT

Applied Materials 0041-05536 LINER,CHAMBER,Y203-OXALIC 300MM EMAX AMAT

USD 12000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: NEW
Listed: Apr 23, 2024 03:00 UTC
End recorded: Dec 7, 2024 06:48 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
AMAT 0041-05536 CHAMBER LINER CT, USED CLEANED

AMAT 0041-05536 CHAMBER LINER CT, USED CLEANED

USD 9500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Sep 15, 2022 21:30 UTC
End recorded: Dec 7, 2024 08:41 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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