Product description
Sensor assembly for loadlock cassette-present detection, associated with Sunx CY-27 style sensor and mounting bracket.
Specifications and identifiers
identification
| Detection function | loadlock cassette present Detects whether a cassette/carrier is present in the loadlock area. |
|---|
| Sensor reference | Sunx CY-27 Vendor/model context appears in one source. |
|---|
| Includes | mounting bracket / sensor assembly Hardware may include bracketry for mounting/alignment. |
|---|
Applications
loadlock cassette detectionwafer handling interlocksprocess monitoringloadlock cassette detectionwafer-carrier presence interlock
How it works
A sensor assembly detects presence, position, flow, or process state and reports that signal to tool controls.
Sensors are interlock-critical and can stop motion or process operation if they fail or drift.
Technical guide
photoelectric_sensing
Photoelectric sensors detect an object or target using light interruption or reflection.
- cassette_present
- A signal indicating a wafer cassette or carrier is detected at the expected station.
What to verify before purchase
- Confirm sensor model, cable length, bracket orientation, and normally-open/normally-closed output behavior.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.