Product description
Sensor assembly for robot home/position sensing, associated with Applied Materials PVD/Endura robot hardware.
Specifications and identifiers
provided characteristics
| Function | robot home/position sensing |
|---|
| Associated subsystem | robot assembly |
|---|
| Possible platform context | PVD Endura Verify against tool documentation before use. |
|---|
Equipment context
- Applied Materials Endura PVD robot
Applications
robot home/position detectionwafer handling interlocksPVD/Endura robot modulesrobot home reference sensingwafer-transfer robot position feedback
How it works
A sensor assembly combines a sensing element with its mounting or wiring hardware so a tool controller can detect position, presence, or state.
Robot and chamber sensors are interlock-critical; incorrect sensor style or mounting can cause homing faults, wafer-transfer errors, or tool safety faults.
Technical guide
robot home sensing
Used to establish a known reference position for a robot or moving axis.
- HOM
- Likely shorthand for home or homing in the provided part wording.
What to verify before purchase
- Confirm revision, cable/connector style, bracket/mounting hardware, and sensor polarity/type.
- Verify whether HOM wording denotes home sensor for the target robot axis.
Confirm with the seller
- Exact robot model and full electrical specifications are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.