Product description
Shell assembly, 195 mm, semi-notch/no-flat DPS ESC-related component.
Specifications and identifiers
Identifying details
| Assembly description | Shell assembly, 195 mm, semi-notch, no-flat Core description repeated across multiple sources. |
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| Application context | DPS / ESC DPS and electrostatic chuck context appear in provided evidence. |
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| Reported materials | Ceramic or polyimide reported Material descriptions vary and should be verified. |
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Applications
DPS chamber hardwareelectrostatic chuck assembly servicewafer-support component replacementESC shell replacementDPS wafer-support hardware maintenance
How it works
An ESC shell assembly is a structural or insulating shell component associated with an electrostatic chuck or wafer-support assembly.
ESC-related components affect wafer support, chuck insulation, process uniformity, and fit within the chamber.
Technical guide
ceramic
Ceramic may be used for insulation and plasma-facing durability; exact material is not confirmed.
polyimide
Polyimide may be used as an insulating polymer; evidence contains a material reference that should be verified.
- DPS
- Decoupled Plasma Source or Applied Materials DPS platform context
- ESC
- Electrostatic chuck
What to verify before purchase
- Verify actual material, diameter, notch/flat configuration, and matching ESC assembly.
- Confirm whether part is standalone shell or included in a larger 200 mm DPS ESC assembly.
Confirm with the seller
- Exact material and parent assembly composition are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.