Product description
Shell assembly for a DPS electrostatic chuck/chamber configuration, described around 145 mm / 150 mm size context.
Specifications and identifiers
identified features
| Component type | ESC shell assembly Shell assembly associated with an electrostatic chuck. |
|---|
| Process/chamber clue | DPS chamber DPS context appears in evidence. |
|---|
| Size clue | 145 mm / 150 mm class Sources vary between 145 mm and 150 mm; verify physical specification. |
|---|
Equipment context
- Applied Materials DPS chamber
Applications
wafer clampingplasma process chambersPVD/etch modulesthermal/mechanical chamber supportDPS chamber ESC serviceelectrostatic chuck rebuildprocess chamber hardware
How it works
A chamber part associated with wafer clamping or electrostatic chuck support.
ESC-related parts must match wafer size, chamber configuration, insulation requirements, and process environment.
Technical guide
ESC
Electrostatic chuck system used to hold wafers during processing.
- ESC
- Electrostatic chuck.
What to verify before purchase
- Confirm actual size, material/polymer type, included companion parts, and DPS chamber variant.
- Verify whether the item is only the shell or a larger ESC assembly.
Confirm with the seller
- Exact size and included companion parts are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.