Product description
Applied Materials 0090-76115 300 mm wafer sensor assembly using Banner SM312CV2 Mini-Beam photoswitch / IR convergent sensor.
Specifications and identifiers
identification
| Sensor model | Banner SM312CV2 |
|---|
| Function | 300 mm wafer sensor |
|---|
| Sensor type | Mini-Beam photoswitch / IR convergent sensor |
|---|
Applications
wafer presence detectiongas monitoringtemperature or pressure monitoringequipment safety interlocksWafer presence detectionMainframe wafer sensor replacementRobot or transfer interlock sensing
How it works
A sensor or detector assembly used to detect wafer presence, gas condition, temperature, pressure, or utility status.
Sensor output type, calibration, mounting geometry, and cleanliness determine whether the tool can interlock and control correctly.
Technical guide
photoelectric sensor
Uses light to detect object presence
- 300 mm
- Wafer size class
What to verify before purchase
- Verify Banner sensor model and cable termination
- Confirm mounting bracket/geometry
- Test output type and sensing distance
Confirm with the seller
- Exact installation location is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.