Product description
PSD board PCB card for beam-alignment, sensor, Faraday, E-chuck, and gripper-in-loadlock positions; assembly family 0120-01139 with fabrication board 0110-01139.
Specifications and identifiers
revision or variant notes
| Suffix examples | P3, P4, P5, P6, P7, P8 Verify the suffix and application position before interchange. |
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supported details
| Board family | PSD board PCB card PSD generally refers to a position-sensitive detector interface in this context. |
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| Related assembly number | 0120-01139 The assembly number appears with multiple position suffixes. |
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| Fabrication number | 0110-01139 This is the requested Applied Materials part/fab number. |
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| Application variants | Beam align, E-chuck, Z sensor, Y sensor, X sensor, Faraday, gripper in loadlock The same board/fab family appears with multiple position-specific cards or suffixes. |
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Applications
beam alignment systemstemperature probingoptical sensingwafer/chuck monitoringposition-sensitive detector board servicebeam alignment or sensor interface card replacementE-chuck or loadlock gripper interface board support
How it works
A sensor-related assembly used to detect position, temperature, light, or process/tool state.
Sensor assemblies must match signal type, calibration, cable length, optics, and the tool's I/O expectations.
Technical guide
PSD
Position-sensitive detector; a sensor used to detect the position of a light spot or beam.
What to verify before purchase
- Exact 0120-01139 suffix or position code needed
- Revision and connector population
- Whether replacement is for beam align, E-chuck, Faraday, X/Y/Z sensor, or gripper-in-loadlock use
Confirm with the seller
- Direct interchange among all suffix/application variants
- Tool platform compatibility
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.