Product description
HF RF match control PCB board, associated with assembly 0100-20131 and FAB 0110-20131.
Specifications and identifiers
supported identity
| Supported item noun | HF RF match control PCB board Repeated evidence identifies this as the control board for an RF match subsystem. |
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| Associated assembly/fab numbers | 0100-20131 assembly / 0110-20131 FAB Provided evidence ties the requested part to the PCB fabrication number used on the match control board. |
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| Revision evidence | Rev C appears in one source Revision should be verified on the physical board. |
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Equipment context
- Semiconductor process equipment
Applications
plasma etchPVD sputterCVD plasma enhancementRF bias or source systemsRF match control board replacementplasma tool RF matching subsystem serviceHF match control electronics
How it works
An RF power or matching component used to generate, route, or tune radio-frequency energy for a plasma process.
RF components must match frequency, power range, connectors, cooling, and control interface to avoid poor plasma performance or equipment damage.
Technical guide
evidence_scope
Exact internal components and calibration are not confirmed from the part evidence.
typical
metal enclosures, RF conductors, insulators, and electronic components
generator
RF power source for process plasma
match
impedance matching network/controller for RF power transfer
- HF
- high frequency
- LF
- low frequency
What to verify before purchase
- Verify whether the needed number is the board assembly number 0100-20131 or FAB number 0110-20131.
- Confirm revision and connector population.
Confirm with the seller
- Complete RF match model compatibility.
- Bare fab board versus populated assembly status.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.