Product description
Top/bottom zone IR sensor PCB board; assy 0100-14014 and schematic/reference 0130-14014 context.
Specifications and identifiers
board identity
| Function | Top/bottom zone IR sensor board |
|---|
| Assembly context | 0100-14014 |
|---|
| Reference/schematic context | 0130-14014 |
|---|
revision context
| Revisions referenced | Rev C1, Rev C2, Rev D |
|---|
Applications
IR lamp sensingWafer edge detectionTool safety/interlock sensingIR lamp/zone sensingTemperature or lamp monitoring board
How it works
A sensor assembly detects optical, thermal, position, edge, or process-state signals for the control system.
Sensor boards and detector assemblies are often revision-specific and require matching optics, calibration, and connectors.
Technical guide
IR_sensor
Infrared sensors detect thermal radiation or lamp-related energy.
edge_detection
Edge sensors are used to detect wafer/substrate position or boundaries.
- IR
- Infrared.
- Rev
- Hardware revision.
What to verify before purchase
- Verify board revision, top vs bottom zone configuration, connector population, and calibration requirements.
- Confirm whether 0130-14014 is the schematic/reference number while 0100-14014 is the assembly number.
Confirm with the seller
- Exact sensor calibration and tool chamber compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.