Product description
Applied Materials RF match assembly using Advanced Energy AZX90 hardware, part 0190-00209.
Specifications and identifiers
identification
| RF component | RF source match / RF match assembly |
|---|
| Supplier/model reference | Advanced Energy AZX90 |
|---|
| Frequency reference | 12.56 MHz appears in source evidence Verify actual nameplate; many semiconductor RF systems are frequency-specific. |
|---|
| Voltage reference | 115 V appears in source evidence Verify input power requirement. |
|---|
Equipment context
- Applied Materials RF source/match subsystem
Applications
plasma etchPVD sputteringCVD plasma applicationsbias or source RF deliveryRF impedance matchingplasma source matchingRF match service
How it works
An RF generator or RF match component supplies or tunes radio-frequency power used in plasma processing.
Frequency, power rating, impedance match range, cooling, connectors, and tool configuration must match the chamber.
Technical guide
- RF
- Radio frequency.
- match
- Impedance matching network used to transfer RF power efficiently.
What to verify before purchase
- Verify frequency and power rating
- Confirm AZX90 model and AE part number
- Check water/air cooling and connector style
Confirm with the seller
- Exact chamber/tool compatibility
- Tuning range
- Condition of vacuum capacitors or matching components
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.