Product description
Applied Materials 0190-02060 retrofit kit for 5000 MK-II slit valve 513, associated with VAT/Monovat-style 0340X-MH24-API1 valve hardware.
Specifications and identifiers
identification
| Kit type | Retrofit kit |
|---|
| Valve context | 5000 MK-II slit valve 513 |
|---|
| Associated valve code | 0340X-MH24-API1 |
|---|
Equipment context
- Applied Materials 5000 MK-II / Precision 5000-style platform
Applications
slit valve servicevacuum isolationload-lock and process chamber interfacesSlit valve retrofit5000 MK-II vacuum interface updateReplacement or upgrade kit for chamber isolation valve
How it works
A valve or valve-related kit used to isolate, vent, or control gas or vacuum flow.
Valve geometry, seal condition, actuation method, and flange size must match the tool position to maintain vacuum integrity and safe operation.
Technical guide
pneumatic actuation
uses compressed air to move the valve or actuator
- NW/KF
- quick-flange vacuum fitting family
What to verify before purchase
- Confirm complete kit contents
- Verify anodized/finish requirements
- Confirm valve model and tool revision before installation
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.