Product description
Hybrid seal assembly for a heater or quartz window interface, used as an Applied Materials process-module sealing component.
Specifications and identifiers
seal identification
| Seal type | Hybrid seal / hybrid seal assembly |
|---|
| Interface | Heater window or quartz window |
|---|
| Possible materials | Viton, Avalon 56, or Greene Tweed wording appears in evidence; exact compound must be verified |
|---|
Applications
vacuum chamber sealinggas and chemical handlinggate valve refurbishmentprocess module maintenanceheater window sealingquartz window sealingprocess chamber maintenance
How it works
A sealing component used to maintain vacuum, gas, or liquid containment at an interface.
Seal material, geometry, hardness, size, and chemical compatibility determine whether the part can hold vacuum and survive the process environment.
Technical guide
elastomer_note
Seal materials such as Chemraz, Viton, or fluoropolymer compounds are chosen for chemical and temperature resistance; exact compound must be verified.
- CSD
- Cross-section diameter, a critical O-ring or seal dimension.
What to verify before purchase
- Confirm exact material/compound and whether the required item is the seal alone or a seal assembly.
- Verify heater-window geometry and revision against the installed module.
Confirm with the seller
- Exact elastomer compound and temperature rating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.