Product description
Assembly, TC, heater, WXZ; thermocouple/heater temperature-probe style assembly.
Specifications and identifiers
identified features
| Function | TC / HTR Thermocouple and heater-related assembly terminology. |
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| Variant/context | WXZ Likely a configuration or chamber-position code that should match the installed tool. |
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| Process context | CVD references Associated with CVD hardware in provided descriptions. |
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Equipment context
- Applied Materials CVD hardware
Applications
process monitoringinterlockswafer detectionpressure measurementheater temperature sensingCVD chamber thermal hardware
How it works
A sensor or detector assembly measures tool state, process endpoint, wafer presence, pressure, or position.
Sensor outputs, calibration range, optical/mechanical alignment, and controller compatibility are important for reliable tool operation.
Technical guide
- TC
- Thermocouple when used with heater/temperature assemblies
- TEOS
- Tetraethyl orthosilicate process chemistry context
What to verify before purchase
- Verify probe length, connector, resistance/temperature element type, and WXZ configuration.
- Confirm revision and whether it is part of a larger heater kit.
Confirm with the seller
- Exact electrical ratings are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.