Product description
Gate for 5000 ZA slit valve, anodized, Applied Materials 0190-09533.
Specifications and identifiers
key details
| Function | slit valve gate Gate component for a slit valve opening/closing path. |
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| Finish | anodized Surface treatment commonly used on aluminum components. |
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| Platform/context | 5000 ZA Tool or valve-family context to verify. |
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Applications
vacuum isolationslit valvespendulum valvesgas or exhaust controlloadlock/chamber isolationslit valve serviceApplied Materials 5000-series hardware
How it works
A valve, gate, actuator, or valve service component used to control gas or vacuum flow.
Sealing condition, actuator style, port size, and compatibility with the tool process environment are critical.
Technical guide
anodized aluminum
Common finish for corrosion resistance and reduced particle generation when specified.
- DN
- Nominal metric flange size.
- NW/KF
- Vacuum fitting size family.
What to verify before purchase
- Verify valve model and gate dimensions.
- Check anodized coating condition and sealing surface wear.
- Confirm whether hardware or seals are included.
Confirm with the seller
- Exact chamber/module compatibility beyond 5000 ZA wording is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.