Product description
Inficon PCG410/CDG-Pirani process vacuum analog gauge, 1125 Torr range, for Applied Materials part 0190-09901.
Specifications and identifiers
identified features
| Gauge type | Capacitance Pirani vacuum gauge Combination gauge technology for vacuum measurement. |
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| Vendor/model context | Inficon PCG410 / CDG-Pi Evidence identifies Inficon model/family context. |
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| Range | 1125 Torr Pressure range stated in the provided evidence. |
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| Output context | Analog process vacuum gauge Evidence includes analog gauge wording. |
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Applications
process vacuum monitoringforeline/chamber pressure measurementsemiconductor tool interlocksProcess vacuum pressure sensingChamber or foreline vacuum monitoring
How it works
A capacitance/Pirani vacuum gauge combines pressure-measurement technologies to cover process vacuum ranges useful for chamber or line monitoring.
Vacuum gauge accuracy and range are critical for process control, pumpdown verification, and interlocks.
Technical guide
Pirani gauge
Measures pressure indirectly from gas thermal conductivity.
capacitance diaphragm gauge
Measures pressure by diaphragm deflection, often valued for gas-independent measurement over its usable range.
- Torr
- Pressure unit commonly used in vacuum systems.
What to verify before purchase
- Verify connector, output signal, calibration status, and exact Inficon model variant.
- Confirm pressure range and gas compatibility.
Confirm with the seller
- Exact electrical connector and calibration condition are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.