0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMATAMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION, USEDAMAT 0190-10187 HEAD SWEEP MOTOR W/ LINEAR BEARING, USEDAMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION , USED0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMAT0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMAT0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMAT0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMATAMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION, USED0190-10187 / HEAD SWEEP SERVO MOTOR / APPLIED MATERIALS AMAT	AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION, USED0190-10187 / HEAD SWEEP SERVO MOTOR / APPLIED MATERIALS AMAT	AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION
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APPLIED MATERIALS 0190-10187

Yaskawa Head Sweep Servo Motor

Market Availability & Pricing

Part number0190-10187
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales200 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Motion & Robotics › Motor Assemblies
Yaskawa Head Sweep Servo Motor
APPLIED MATERIALS0190-10187Servo motor assembly
Product description
Applied Materials 0190-10187 Yaskawa head sweep servo motor for 300 mm Reflexion-related use; one source references a head sweep motor with linear bearing.
Specifications and identifiers
identification
SupplierYaskawa
FunctionHead sweep servo motor
Reported platform context300 mm Reflexion
Applications
robot and cassette handlingCMP head sweep or pad conditioningslit valve and chamber mechanismsCMP head sweep motionReflexion tool motion axis serviceServo motor replacement
How it works

A motor, actuator, bearing, or motion-control component used to move a wafer handling or chamber mechanism.

Stroke, torque, gearing, feedback, and mounting geometry must match the original axis or mechanism.

Technical guide
servo motor

motor with feedback control for precise motion

What to verify before purchase
  • Verify Yaskawa motor model/nameplate
  • Confirm whether linear bearing is included
  • Check encoder/cable compatibility and mechanical mounting
Confirm with the seller
  • Exact Yaskawa model and axis configuration are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMAT

0190-10187 / YASKAWA HEAD SWEEP SERVO MOTOR 300MM REFLEXION / AMAT

USD 571.60

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 30, 2026 16:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 23, 2026 11:38 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION, USED

AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION, USED

USD 1500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 6, 2024 08:01 UTC
End recorded: Dec 7, 2024 08:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION , USED

AMAT 0190-10187 HEAD SWEEP SERVO MOTOR, 300MM REFLEXION , USED

USD 1500.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 4, 2023 02:00 UTC
End recorded: Dec 6, 2024 19:35 UTC
Estimated remaining at check: 6
Estimated sold at check: 1

eBay response captured — Checked Oct 24, 2026 11:34 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-10187 HEAD SWEEP MOTOR W/ LINEAR BEARING, USED

AMAT 0190-10187 HEAD SWEEP MOTOR W/ LINEAR BEARING, USED

USD 2700.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 4, 2023 02:00 UTC
End recorded: Dec 6, 2024 19:35 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 24, 2026 11:34 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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