Product description
Applied Materials 0190-10187 Yaskawa head sweep servo motor for 300 mm Reflexion-related use; one source references a head sweep motor with linear bearing.
Specifications and identifiers
identification
| Supplier | Yaskawa |
|---|
| Function | Head sweep servo motor |
|---|
| Reported platform context | 300 mm Reflexion |
|---|
Applications
robot and cassette handlingCMP head sweep or pad conditioningslit valve and chamber mechanismsCMP head sweep motionReflexion tool motion axis serviceServo motor replacement
How it works
A motor, actuator, bearing, or motion-control component used to move a wafer handling or chamber mechanism.
Stroke, torque, gearing, feedback, and mounting geometry must match the original axis or mechanism.
Technical guide
servo motor
motor with feedback control for precise motion
What to verify before purchase
- Verify Yaskawa motor model/nameplate
- Confirm whether linear bearing is included
- Check encoder/cable compatibility and mechanical mounting
Confirm with the seller
- Exact Yaskawa model and axis configuration are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.