Product description
Advanced Energy 3153106-000 AC input module / A/C ESC power-supply module for HTESC high-voltage power.
Specifications and identifiers
identification
| Vendor reference | Advanced Energy / AE 3153106-000 Vendor/module reference appearing in evidence. |
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| Function | AC input module for HTESC high-voltage power Input module associated with electrostatic chuck high-voltage power. |
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| Platform context | Endura 5500 appears in evidence Platform context should be verified against the tool BOM. |
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Equipment context
- Applied Materials Endura 5500
Applications
ESC high-voltage power systemsAdvanced Energy power modulesequipment power racksESC high-voltage power inputelectrostatic chuck power subsystempower-supply module replacement
How it works
An AC input module conditions or routes incoming AC power for a downstream power supply or high-voltage system.
Input modules must match voltage, interlock, connector, and downstream supply requirements.
Technical guide
- AE
- Advanced Energy
- ESC
- Electrostatic chuck
- HTESC
- High-temperature electrostatic chuck context
What to verify before purchase
- Exact revision and connector/keying against the tool BOM.
- Physical condition, configuration, and whether any mating hardware is included.
Confirm with the seller
- Exact tool compatibility beyond the context stated in the evidence.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.