Product description
Duplex spindle bearing pair for Applied Materials Mirra / 3400 CMP polisher spindle, 200 mm context.
Specifications and identifiers
bearing identity
| Component type | Spindle duplex bearing pair |
|---|
| Referenced vendor/context | Barden precision bearing Evidence references Barden in one description; verify markings. |
|---|
tool context
| Referenced tool/platform | Applied Materials Mirra / 3400 CMP polisher |
|---|
| Wafer size context | 200 mm |
|---|
Equipment context
- Applied Materials Mirra CMP polisher
- Applied Materials 3400 CMP Mirra polisher
Applications
Semiconductor process chambersWafer transfer assembliesOEM chamber kits and subassembliesCMP spindle bearing replacementPrecision rotating spindle support
How it works
A mechanical component used as part of a process chamber, transfer mechanism, or tool subassembly.
Mechanical dimensions, material, revision, and exact tool position are usually more important than the generic part noun.
Technical guide
stainless_steel
Durable corrosion-resistant alloy common in process equipment.
titanium
Lightweight, corrosion-resistant metal used in some chamber hardware.
- frog leg
- A linked wafer-transfer mechanism style used in vacuum handling.
- shim
- A thin spacer or alignment piece.
What to verify before purchase
- Verify bearing pair orientation, preload class, vendor markings, and packaging cleanliness.
- Confirm Mirra spindle assembly compatibility.
Confirm with the seller
- Exact bearing dimensions and preload are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.