Spectrum B-5002 MKS ENI B-5002-02 RF Generator 5kW @ 1.8-2.17MHz AMAT 0190-15320AMAT 0190-15320 ENI B-5002-02 5KW RF GENERATORApplied Materials 0190-15320 ENI B-5002-02 GENERATOR AMATApplied Materials 0190-15320 ENI B-5002-02 GENERATOR AMATMKS ENI Spectrum B-5002-02 DC Power Supply, AMAT # 0190-15320Spectrum B-5002 ENI B-5002-02 RF Generator AMAT 0190-15320 Tested Working SpareSpectrum B-5002 ENI B-5002-02 RF Generator AMAT 0190-15320 Used Tested WorkingENI B-5002-02 SPECTRUM RF GENERATOR AMAT 0190-15320 MKS 5kW 1.8-2.17MHzSpectrum B-5002 ENI B-5002-02 RF Generator AMAT 0190-15320 Power Failure As-IsMKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320Spectrum  B-5002 MKS ENI B-5002-02 RF Generator AMAT 0190-15320 Tested WorkingSpectrum B-5002 MKS B-5002-02 RF Generator Rev. 00F AMAT 0190-15320 RefurbishedSpectrum B-5002 MKS B-5002-02 RF Generator Rev. B AMAT 0190-15320 RefurbishedMKS ENI B-5002-02 RF Generator Spectrum AMAT 0190-15320 NewMKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320Spectrum B-5002 MKS ENI B-5002-02 RF Generator AMAT 0190-15320 Tested As-IsMKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT # 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320ENI B-5002-02 Spectrum RF Generator 5kW AMAT 0190-15320 TestedMKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320MKS ENI Spectrum B-5002 RF Power Supply AMAT 0190-15320
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Applied Materials 0190-15320

ENI Spectrum B-5002-02 RF Generator

Market Availability & Pricing

Part number0190-15320
ManufacturerApplied Materials
Current availabilitySee listings below
Latest completed listing with reported sales4250 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
ENI Spectrum B-5002-02 RF Generator
Applied Materials0190-15320RF generator
Product description
MKS ENI Spectrum B-5002 / B-5002-02 RF generator, 5kW at 1.8-2.17MHz context
Specifications and identifiers
observed
Vendor/modelMKS ENI Spectrum B-5002 / B-5002-02
Repeated in provided titles.
Reported rating5kW @ 1.8-2.17MHz
Appears in multiple titles; verify on unit nameplate.
AMAT part0190-15320
Applied Materials reference number.
Equipment context
  • Applied Materials equipment using MKS/ENI Spectrum B-5002 RF generators
Applications
Plasma processingRF power deliveryEtch/CVD/PVD power subsystemsRF generator replacementPlasma power supply spare
How it works

An RF generator supplies radio-frequency power for plasma generation or process excitation.

Correct frequency, output power, interface, and matching network compatibility are critical for plasma stability and tool safety.

What to verify before purchase
  • Verify exact model B-5002 vs B-5002-02 and revision.
  • Confirm output power/frequency, input power, connector type, and control interface.
  • Check tested/refurbished status and fault history.
Confirm with the seller
  • Specific Applied Materials tool
  • Matching network compatibility
  • Communication protocol

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

No image available

Spectrum ENI Power Systems B-5002-02 RF Generator MKS AMAT 0190-15320 Surplus

USD 8003.2400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 13, 2024 20:01 UTC
End recorded: Dec 7, 2024 02:40 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

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