0190-15377 / 3-PORT UPA-A 200MM REV 2D PLUS / APPLIED MATERIALS AMATAMAT 0190-15377 3-PORT UPA-A 200MM REV 4D, USEDAMAT 0190-15377 3-PORT UPA-A 200MM REV 2D PLUSAMAT Applied Materials 0190-15377 3-Port UPA-A Module MKS PARAM REV200-6-R7 T9Lot-2 AMAT Applied Materials 0190-15377+0190-15378 3-Port UPA-A Module MKS T9B11AMAT Applied Materials 0190-15377 3-Port UPA-A Module MKS *PARTS T12-E3AMAT Applied Materials 0190-15377 3-Port UPA-A Module MKS Instruments WorkingAMAT 0190-15377 3-PORT UPA-A 200MM REV 2D PLUSAMAT 0190-15377 3-PORT UPA-A 200MM REV 2D PLUSAMAT 0190-15377 3-PORT UPA-A 200MM (NEW) Qty:1AMAT 0190-15377 3-PORT UPA-A 200MM (NEW) Qty:1Applied Materials 0190-15377 3-PORT UPA-A 200MMAMAT 0190-15377 MKS 3-PORT AMAT 0190-15377 MKS 3-PORT AMAT 0190-15377 MKS 3-PORT AMAT 0190-15377 MKS, 3-PORT USEDAMAT 0190-15377 MKS, 3-PORT USEDApplied Materials 0190-15377 3-PORT UPA-A NEW, UnopenedAMAT 0190-15377 MKS, 3-PORT USEDApplied Materials Mirra / Reflexion Contour Head 3 Port UPA - A 0190-15377
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APPLIED MATERIALS 0190-15377

MKS 3-Port UPA-A Module

Market Availability & Pricing

Part number0190-15377
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales750 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Control › Process Control Modules › Gas & Pressure Control Modules
MKS 3-Port UPA-A Module
APPLIED MATERIALS0190-15377process control module
Product description
MKS 3-port UPA-A module, Applied Materials 0190-15377
Specifications and identifiers
identified features
Module type3-port UPA-A module
Process-control module with three-port configuration.
Vendor referenceMKS
MKS Instruments context appears in the provided descriptions.
Related paired part0190-15378 mentioned with some lots
May be a companion module or paired assembly; verify before substitution.
Related parts
Equipment context
  • Applied Materials equipment
Applications
gas delivery modulespressure/process-control electronicsMKS process-control hardwaregas or pressure process controlmodule replacementMKS interface hardware service
How it works

A process-control module interfaces with gas, pressure, or process-control functions in semiconductor equipment.

Module compatibility can depend on port configuration, firmware, electrical interface, and process-gas service.

Technical guide
3-port
Indicates a three-port configuration.
UPA-A
Module/model designation that should be verified against the label.
What to verify before purchase
  • Confirm MKS model/label, revision, and port configuration.
  • Verify whether 0190-15378 is required as a paired item.
  • Check process-gas compatibility and calibration status if applicable.
Confirm with the seller
  • Exact media, pressure range, and communication interface are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0190-15377 / 3-PORT UPA-A 200MM REV 2D PLUS / APPLIED MATERIALS AMAT

0190-15377 / 3-PORT UPA-A 200MM REV 2D PLUS / APPLIED MATERIALS AMAT

USD 4500.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 28, 2026 15:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-15377 3-PORT UPA-A 200MM REV 4D, USED

AMAT 0190-15377 3-PORT UPA-A 200MM REV 4D, USED

USD 5500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: May 2, 2025 08:59 UTC
Estimated remaining at check: 6
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-15377 3-PORT UPA-A 200MM REV 2D PLUS

AMAT 0190-15377 3-PORT UPA-A 200MM REV 2D PLUS

USD 5500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Dec 7, 2024 04:31 UTC
End recorded: Dec 7, 2024 04:31 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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