CDX-2000 Comdel FP5320R3 Dual RF Generator AMAT 0190-15399 Used Tested WorkingAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399AMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399AMAT 0190-15399 Comdel CDX-2000 RF Generator 1000W Dual Frequency 13.56 MHz/2MHzAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399AMAT 0190-15399 Comdel CDX-2000 RF Generator 1000W Dual Frequency 13.56 MHz/2MHzAMAT 0190-15399 Comdel CDX-2000 RF Generator 1000W Dual Frequency 13.56 MHz/2MHzAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399AMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyCDX-2000 Comdel FP5320R3 Dual RF Generator AMAT 0190-15399 Tested WorkingAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyCDX-2000 Comdel FP5320R3 Dual RF Generator AMAT 0190-15399 As-IsAMAT Comdel CDX-2000 Dual Frequency RF Generator 1000W 0190-15399 / WarrantyCDX-2000 Comdel FP5320R3 Dual RF Generator AMAT 0190-15399 Not Working
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APPLIED MATERIALS 0190-15399

Comdel CDX-2000 dual-frequency RF generator

Market Availability & Pricing

Part number0190-15399
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales3502.18 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Electrical › RF Power › RF Generators
Comdel CDX-2000 dual-frequency RF generator
APPLIED MATERIALS0190-15399dual-frequency RF generator
Product description
Comdel CDX-2000 / FP5320R3 dual RF generator, 1000 W, 13.56 MHz / 2 MHz.
Specifications and identifiers
electrical ratings
RF power referenced1000 W
Evidence-stated rating; verify on nameplate.
Frequencies referenced13.56 MHz and 2 MHz
Evidence-stated dual-frequency configuration; verify on nameplate.
identification
OEM part number0190-15399
Associated modelComdel CDX-2000 / FP5320R3
Normalized descriptionDual-frequency RF generator
Equipment context
  • Comdel CDX-2000 / FP5320R3 RF generator
Applications
plasma etchplasma CVDPVD/plasma processingRF power generation for plasma processingdual-frequency plasma power subsystemRF generator replacement/repair
How it works

An RF generator converts facility electrical power into radio-frequency power for plasma creation or plasma bias.

The frequency and power rating must match the process chamber, matching network, and control interface.

Technical guide
13.56 MHz
Common industrial RF frequency.
2 MHz
Lower RF frequency often associated with bias power in plasma tools.
What to verify before purchase
  • Confirm nameplate model FP5320R3/CDX-2000.
  • Confirm power and frequency ratings.
  • Confirm cooling, control interface, and connector configuration.
Confirm with the seller
  • Specific AMAT chamber compatibility.
  • Operating condition.
  • Whether all CDX-2000 variants share the same ratings.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

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