Product description
Spellman X3208 high-voltage ESC power supply module for Applied Materials part 0190-17029, with descriptions including ESC5PN25X3208 and DC output references.
Specifications and identifiers
supported details
| Vendor/model | Spellman X3208 / ESC5PN25X3208 Vendor and model references recur in the evidence. |
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| Function | ESC high-voltage power supply Supports electrostatic chuck high-voltage power. |
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| Reported output context | 2 kV / 5 kV, 25 W, 24 VDC input description Specific electrical ratings appear in one description and should be verified on the nameplate. |
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Applications
RF generationhigh-voltage ESC suppliesDC power distributionprocess power controlHigh-voltage electrostatic chuck supply service.RF/match or chamber subsystems that require the X3208 module configuration.
How it works
A high-voltage ESC power supply module that supplies, controls, or conditions electrical power for a tool subsystem.
Power components must match voltage, current, frequency, communications, and safety ratings before installation.
Technical guide
- ESC
- electrostatic chuck
- HV
- high voltage
- RF
- radio frequency
What to verify before purchase
- Confirm Spellman model, revision, input/output ratings, and connector/keying from the nameplate.
- Verify whether the part is a standalone supply or part of a larger RF match assembly.
Confirm with the seller
- Operational condition and high-voltage calibration are not confirmed.
- Exact chamber/tool compatibility is not confirmed beyond Applied Materials ESC context.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.