Product description
Applied Materials 0190-17779 Advanced Energy VHF Ovation 2760 RF generator, associated with model 3150292-007 and 2.7 kW wording.
Specifications and identifiers
identification
| Supplier/model | Advanced Energy Ovation 2760 |
|---|
| Associated model number | 3150292-007 |
|---|
| Reported power | 2.7 kW appears in evidence |
|---|
| Frequency class | VHF/RF generator |
|---|
Applications
plasma etchPVD/CVD chambersRF power racksPlasma process RF powerCVD/etch/PVD RF generator serviceVHF plasma power source
How it works
A power source used to generate RF energy for plasma processing.
Frequency, output power, match interface, cooling, and control communication must fit the process tool.
Technical guide
RF generator
radio-frequency power source for plasma systems
- MHz
- megahertz frequency unit
What to verify before purchase
- Verify exact revision suffix and output rating
- Confirm input voltage, cooling, and interface
- Test RF output and interlocks before use
Confirm with the seller
- Exact revision letter and tool compatibility are not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.