Product description
ASTeX ETO RF generator rack, 80-S09-UW / related model references, for Applied Materials Centura/HDP context
Specifications and identifiers
identification
| Component form | RF generator rack Rack-level assembly containing RF generator or RF power delivery hardware. |
|---|
| Supplier/family | ASTeX ETO ETO/ASTeX references are associated with the rack in the evidence. |
|---|
| Model references | 80-S09-UW, 80S09MW, ARX-X272 mentioned Model/configuration references vary and should be verified against the unit. |
|---|
| Tool context | Centura / HDP mentioned Possible Applied Materials platform context, not a compatibility guarantee. |
|---|
Equipment context
- Applied Materials Centura
- Applied Materials HDP configuration
Applications
HDP/CVD or plasma process toolsCentura RF power racksRF generator subsystem replacementRF generator rack replacementPlasma power delivery maintenanceHDP/Centura RF subsystem service
How it works
An RF generator rack is a rack-mounted RF power subsystem used to energize plasma process hardware.
Rack configuration, generator model, impedance matching, cooling, interlocks, and power requirements must match the tool configuration.
Technical guide
RF power
High-frequency electrical power used to create or sustain plasma.
What to verify before purchase
- Confirm exact ASTeX/ETO model and rack contents.
- Verify input voltage, generator output, interlocks, cooling, and included modules.
- Check whether rack is complete, tested, or sold for parts.
Confirm with the seller
- Exact rack configuration and RF output ratings are not confirmed.
- Specific Centura/HDP tool compatibility is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.