Product description
MKS Type 640 pressure controller, 1000 Torr configuration, associated with AMAT part 0190-19522
Specifications and identifiers
identification
| Vendor/model family | MKS Type 640 / 640A Pressure-control hardware family identified in the evidence. |
|---|
| Pressure range | 1000 Torr Range stated in multiple evidence entries. |
|---|
| Configuration references | 640A-27866; 640A13TW2M52T Model/configuration strings associated with the part evidence. |
|---|
Applications
vacuum pressure controlprocess gas deliveryloadlock or chamber pressure regulationvacuum or process pressure controltool gas/pressure regulationchamber or line pressure setpoint control
How it works
A pressure controller used with vacuum or process-gas hardware to regulate or control chamber, line, or process pressure.
Pressure controller range, gas compatibility, valve/control interface, connector type, and calibration status must match the tool configuration.
Technical guide
capacitance_pressure_control
Pressure controllers are often paired with pressure sensors and control valves to maintain a process setpoint.
- MKS Type 640
- A family/model reference associated with MKS pressure-control hardware; exact submodel and configuration should be verified.
- Torr
- A pressure unit commonly used in vacuum systems.
What to verify before purchase
- Confirm exact MKS model and option string on the nameplate
- Verify pressure range, gas compatibility, valve configuration, and calibration status
- Confirm electrical connector/interface requirements
Confirm with the seller
- Some evidence contains alternate MKS configuration strings; interchangeability is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.