Product description
RF resonator assembly for PC II / Preclean 200 mm context.
Specifications and identifiers
rf details
| Function | RF resonator assembly |
|---|
| Context | PC II / Preclean 200 mm |
|---|
| Related reference | 98-008 / R-1359-B Verify against physical label. |
|---|
Applications
plasma etchPVDRF matching networkschamber RF deliveryRF resonator section in preclean chamberplasma/RF energy coupling
How it works
An RF power, RF connector, resonator, or matching-network component used to couple RF energy into a semiconductor process chamber.
Frequency, power rating, connector geometry, grounding, and matching compatibility are critical for safe and stable plasma operation.
What to verify before purchase
- Confirm whether assembly is complete and matches the PC II/preclean configuration.
- Verify revision and any 98-008/R-1359-B markings.
Confirm with the seller
- Frequency/power rating and complete BOM are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.