Product description
Advanced Energy AE 3152344-200 MDX-L12M RF generator associated with Applied Materials part 0190-24702.
Specifications and identifiers
supported identity
| Vendor | Advanced Energy Evidence identifies Advanced Energy/AE. |
|---|
| Model | MDX-L12M / AE 3152344-200 Provided evidence includes these identifiers. |
|---|
| Function | RF generator Both sources identify RF generator function. |
|---|
Equipment context
- Semiconductor process equipment
Applications
plasma etchPVD sputterCVD plasma enhancementRF bias or source systemsRF power generationplasma process power subsystemgenerator rack replacement
How it works
An RF power or matching component used to generate, route, or tune radio-frequency energy for a plasma process.
RF components must match frequency, power range, connectors, cooling, and control interface to avoid poor plasma performance or equipment damage.
Technical guide
evidence_scope
Exact internal components and calibration are not confirmed from the part evidence.
typical
metal enclosures, RF conductors, insulators, and electronic components
generator
RF power source for process plasma
match
impedance matching network/controller for RF power transfer
- HF
- high frequency
- LF
- low frequency
What to verify before purchase
- Verify frequency, power rating, voltage, cooling, and communication interface.
- Confirm Advanced Energy model/part number on nameplate.
Confirm with the seller
- Exact frequency and rated output.
- Functional test/calibration status.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.