MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*MKS/ENI GHW12Z-13DF2N0-002, Amat 0190-25528 1250W, 13.56MHz *Tested*Genesis GHW-12Z ENI GHW12Z-13DF2N0-002 AMAT 0190-25528 Used Tested WorkingENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-14992 0190-25528GHW-12Z ENI GHW12Z-13DF2N0-002 Genesis RF Generator Rev. 00F AMAT 0190-25528ENI GHW-12Z Genesis RF Generator GHW12Z-13DF2N0-002 Rev.00E 0190-25528 as-is
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APPLIED MATERIALS 0190-25528

ENI Genesis GHW-12Z RF Generator

Market Availability & Pricing

RF GENERATOR, GENESIS AE P/N: GHW12Z-13DF2N0-002

Part number0190-25528
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales800 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
ENI Genesis GHW-12Z RF Generator
APPLIED MATERIALS0190-25528RF generator
Product description
ENI/MKS Genesis GHW-12Z RF generator, model GHW12Z-13DF2N0-002, associated with Applied Materials part 0190-25528; 1250 W and 13.56 MHz.
Specifications and identifiers
identification
OEM/vendorENI / MKS
Vendor family associated with the RF generator.
ModelGHW-12Z / GHW12Z-13DF2N0-002
Generator model callout.
Frequency13.56 MHz
RF operating frequency associated with this generator configuration.
Power1250 W
Power rating associated with this generator configuration.
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersRF plasma power sourceetch or deposition RF power
How it works

An RF generator provides radio-frequency power to a plasma process or matching network.

Correct RF generator model, frequency, and power rating matter because mismatch can damage process hardware or prevent stable plasma operation.

Technical guide
RF_power

RF power is commonly used to couple energy into a plasma through an electrode or coil.

ENI
ENI/MKS generators are commonly used as RF power sources in semiconductor equipment.
What to verify before purchase
  • Confirm revision, input power, connector configuration, and tested operating condition.
  • Verify whether 0190-14992 is a related or alternate Applied Materials number before cross-referencing.
Confirm with the seller
  • Specific tool/platform compatibility is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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