Product description
Applied Materials 0190-26370 MKS MFVA-27960 mass flow verifier / PI mass flow verifier valve assembly, with some alternate MKS MFVA model references.
Specifications and identifiers
identification
| Supplier/model | MKS MFVA-27960 is the dominant identifier |
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| Function | Mass flow verifier / PI mass flow verifier valve assembly |
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| Alternate identifiers | MFVA-33168 and MFVA23C026AAA appear in some evidence; verify nameplate |
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Applications
vacuum isolationgas box and mass-flow verificationslit/gate valve actuationfacility fluid handlingGas flow verificationMass-flow controller calibration supportProcess gas delivery diagnostics
How it works
A valve, regulator, actuator, or gas/fluid control component used to control vacuum, gas, coolant, or pneumatic flow.
Port size, actuation method, pressure rating, leak integrity, and seal material must match the process and safety requirements.
Technical guide
stainless steel
common for vacuum and process gas hardware
mass flow verifier
checks or verifies gas flow delivery
pneumatic actuation
uses air pressure to move a valve or cylinder
- NW/KF
- quick-flange vacuum connection standard
- VCR
- metal gasket face-seal fitting standard
What to verify before purchase
- Verify exact MKS model and flow range
- Confirm valve/manifold configuration
- Check calibration status and gas compatibility
Confirm with the seller
- Exact MKS submodel/range is not fully resolved from evidence
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.