ASTeX ASTRONi MKS REV: F, P/N AX7670-(19)64 AMAT 0190-26744MKS Instruments AX7670-19 Atomic Fluorine Generator ASTRONi AMAT 0190-26744 NewASTRONi MKS Instruments AX7670-(16)19 Plasma Source AMAT 0190-26744 Used Tested MKS AX7670-19 Remote Plasma Source ASTRONi AMAT 0190-26744 RefurbishedMKS Instruments AX7670-19 Remote Plasma Source ASTRONi AMAT 0190-26744 As-IsMKS Instruments AX7670-19 Remote Plasma Source ASTRONi AMAT 0190-26744 DamagedMKS Instruments AX7670-19 Remote Plasma Source ASTRONi AMAT 0190-26744 As-IsMKS Instruments AX7670-19 Remote Plasma Source Rev. E AMAT 0190-26744 As-IsASTRONi MKS AX7670-19 Remote Plasma Source Rev. E AMAT 0190-26744 Used WorkingASTRONi MKS AX7670-19 Remote Plasma Source Rev. F AMAT 0190-26744 Used WorkingASTRONi MKS AX7670-19 Remote Plasma Source Rev. E AMAT 0190-26744 Used WorkingMKS Instruments AX7670-19 Remote Plasma Source Astroni AMAT 0190-26744 As-IsASTRONi MKS AX7670-19 Remote Plasma Source Rev. F AMAT 0190-26744 As-IsASTRONi MKS AX7670-19 Remote Plasma Source Rev. E AMAT 0190-26744 As-IsApplied Materials AMAT 0190-26744 MKS ASTeX ASTRONi Remote Plasma Source AX7670 MKS ASTRONi Remote Plasma Generator AX7670-19-R Rev.C as-is 0190-26744
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APPLIED MATERIALS 0190-26744

MKS ASTRONi AX7670-19 remote plasma source

Market Availability & Pricing

ASTRONi Remote Plasma Generator MKS P/N: AX7670-19-R

Part number0190-26744
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales14000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF & Plasma Power › Remote Plasma Sources
MKS ASTRONi AX7670-19 remote plasma source
APPLIED MATERIALS0190-26744Remote plasma source
Product description
MKS/ASTeX ASTRONi AX7670-19 remote plasma source for Applied Materials, part 0190-26744.
Specifications and identifiers
supported details
Supplier/modelMKS/ASTeX ASTRONi AX7670-19
Repeated model/family reference associated with this AMAT part.
AMAT part number0190-26744
Applied Materials internal/OEM part reference.
FunctionRemote plasma source / atomic fluorine generator
Used to generate reactive plasma species remotely from the main process chamber.
Revision referencesRev. C/E/F appear in evidence
Revision must be matched to the installed system.
Equipment context
  • Applied Materials systems using MKS/ASTeX ASTRONi AX7670-19
Applications
remote plasma cleaningplasma-assisted chamber processingprocess gas activationRemote plasma generation for chamber clean or plasma-assisted processingReplacement or service of ASTRONi AX7670-19 source assemblies
How it works

A remote plasma source creates reactive species outside the main process chamber and delivers them to the process area.

It affects chamber clean, strip, surface treatment, and other plasma-assisted processes where stable reactive chemistry is important.

Technical guide
remote_plasma_source

Plasma is generated in a separate source rather than directly at the wafer.

ASTRONi
MKS/ASTeX remote plasma source family name seen in the evidence.
AX7670-19
Supplier model string associated with this part in the evidence.
What to verify before purchase
  • Verify exact AX7670-19 revision and suffix shown on the unit nameplate.
  • Confirm power, gas, cooling, and interlock connectors match the tool configuration.
  • Confirm whether the needed unit is a complete source or a subassembly.
Confirm with the seller
  • Exact Applied Materials platform compatibility is not confirmed.
  • Operating condition is not implied by the identity.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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