Aera FCPIDN980C-ABA Mass Flow Controller AMAT 0190-27877 PI-980 UsedAera AE FCPIDN980C-ABA Mass Flow Controller PI-980 AMAT 0190-27877 NewAERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT AERA / AE PI 980 MGMR 300 SCCM/N2 DNet Mass Flow Controller 0190-27877 MFC AMAT
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APPLIED MATERIALS 0190-27877

Aera PI-980 DeviceNet MFC

Market Availability & Pricing

Part number0190-27877
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales54.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Gas Delivery › Flow Control › Mass Flow Controllers
Aera PI-980 DeviceNet MFC
APPLIED MATERIALS0190-27877Mass flow controller
Product description
Aera/AE PI-980 / FCPIDN980C-ABA DeviceNet mass flow controller, 300 sccm N2 context.
Specifications and identifiers
identified features
Vendor/modelAera / AE PI-980; FCPIDN980C-ABA
Item typeDeviceNet mass flow controller
Gas/range context300 sccm N2
Verify calibration label for exact gas and range.
CommunicationDNet / DeviceNet mentioned
Applications
gas delivery panelsCVD/etch process gas controlcarrier and dopant gas meteringN2 gas meteringGas panel MFC replacement
How it works

A precision gas-flow device that meters a specified gas at a defined flow range.

Gas type, full-scale flow, fittings, calibration, and communication protocol must match the process recipe and gas panel.

Technical guide
DeviceNet

Industrial fieldbus often used for smart gas-panel devices.

MFC

Mass flow controller.

VCR
Metal gasket face-seal fitting style used in high-purity gas systems.
sccm
Standard cubic centimeters per minute; common gas-flow unit.
What to verify before purchase
  • Verify gas calibration, full-scale flow, DeviceNet configuration, fittings, and valve type
  • Confirm whether the unit is configured for N2 or another process gas
Confirm with the seller
  • Exact calibration certificate status is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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