0190-29389 / ADVANCED ENERGY VHF OVATION 35162 POWER SUPPLY 3150861-010E  / AMATAMAT 0190-29389 AE VHF OVATION 35162, 3160861-0100190-29389, 3150861-010E / ADVANCED ENERGY POWER SUPPLY VHF OVATION 35162 / AMATAMAT 0190-29389 Ovation 35162, USED0190-29389, 3150861-010E / ADVANCED ENERGY POWER SUPPLY VHF OVATION 35162 / AMATAdvanced Energy VHF Ovation 3.5kW 162MHz RF 35162 3150861-010 AMAT 0190-29389Advanced Energy VHF Ovation 3.5kW 162MHz RF 35162 3150861-010 AMAT 0190-29389Advanced Energy VHF Ovation 3.5kW 162MHz RF 35162 3150861-010 AMAT 0190-29389Advanced Energy VHF Ovation 3.5kW 162MHz RF 35162 3150861-010 AMAT 0190-29389
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APPLIED MATERIALS 0190-29389

Advanced Energy VHF Ovation 35162 RF power supply

Market Availability & Pricing

Part number0190-29389
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2449.3 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Advanced Energy VHF Ovation 35162 RF power supply
APPLIED MATERIALS0190-29389RF generator
Product description
Advanced Energy VHF Ovation 35162 RF power supply / RF generator, associated with 3150861-010E and Applied Materials part number 0190-29389.
Specifications and identifiers
part attributes
VendorAdvanced Energy
Vendor associated with the item.
Model/familyVHF Ovation 35162
Supported model wording.
Related part3150861-010E
Repeated Advanced Energy identifier.
Nameplate rating3.5 kW, 162 MHz
Specified in one detailed product note; verify on nameplate.
Equipment context
  • Applied Materials VHF RF process module
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersVHF RF plasma power supplyRF generator replacementplasma chamber power delivery
How it works

An RF power delivery component used to generate, condition, or match radio-frequency energy for plasma processing.

RF generators and matching networks must match frequency, power range, connector style, control interface, cooling, and chamber configuration.

Technical guide
impedance_matching

RF matching networks tune the load seen by a generator so power transfers efficiently into the process chamber.

MHz
Megahertz frequency rating; common semiconductor RF systems include 13.56 MHz and other process-specific frequencies.
What to verify before purchase
  • Confirm exact AE part number and suffix.
  • Verify frequency, power rating, cooling, interface, and revision.
  • Inspect service history before reuse.
Confirm with the seller
  • Exact rating should be verified from nameplate or documentation.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0190-29389 / ADVANCED ENERGY VHF OVATION 35162 POWER SUPPLY 3150861-010E  / AMAT

0190-29389 / ADVANCED ENERGY VHF OVATION 35162 POWER SUPPLY 3150861-010E / AMAT

USD 3600.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 9, 2024 20:30 UTC
End recorded: Dec 7, 2024 16:20 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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AMAT 0190-29389 AE VHF OVATION 35162, 3160861-010

AMAT 0190-29389 AE VHF OVATION 35162, 3160861-010

USD 3900.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Aug 24, 2020 11:53 UTC
End recorded: Dec 7, 2024 13:29 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 21, 2026 11:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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