Product description
Advanced Energy VHF Ovation 35162 RF power supply / RF generator, associated with 3150861-010E and Applied Materials part number 0190-29389.
Specifications and identifiers
part attributes
| Vendor | Advanced Energy Vendor associated with the item. |
|---|
| Model/family | VHF Ovation 35162 Supported model wording. |
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| Related part | 3150861-010E Repeated Advanced Energy identifier. |
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| Nameplate rating | 3.5 kW, 162 MHz Specified in one detailed product note; verify on nameplate. |
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Equipment context
- Applied Materials VHF RF process module
Applications
plasma etchPECVDPVD sputteringRF-powered process chambersVHF RF plasma power supplyRF generator replacementplasma chamber power delivery
How it works
An RF power delivery component used to generate, condition, or match radio-frequency energy for plasma processing.
RF generators and matching networks must match frequency, power range, connector style, control interface, cooling, and chamber configuration.
Technical guide
impedance_matching
RF matching networks tune the load seen by a generator so power transfers efficiently into the process chamber.
- MHz
- Megahertz frequency rating; common semiconductor RF systems include 13.56 MHz and other process-specific frequencies.
What to verify before purchase
- Confirm exact AE part number and suffix.
- Verify frequency, power rating, cooling, interface, and revision.
- Inspect service history before reuse.
Confirm with the seller
- Exact rating should be verified from nameplate or documentation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.