Product description
Electrostatic chuck power supply, bipolar isolated output / X4020 context
Specifications and identifiers
identity
| Function | Electrostatic chuck power supply Repeated records identify ESC/electrostatic supply. |
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| Output type | Bipolar isolated output / bias output Supported by descriptions; exact rating must be verified. |
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| Model context | X4020 / ESC1.X4020 Likely model context from records. |
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Applications
lamp driver systemsESC powertool electronics powerElectrostatic chuck bias/clamping powerHigh-voltage isolated output for wafer chucking
How it works
A power supply or power controller converts or regulates power for electronics, heaters, lamps, RF systems, or electrostatic chucks.
Voltage, current, phase, control mode, isolation, and interlock compatibility must match the equipment design.
Technical guide
SCR
Silicon-controlled rectifier, used to regulate AC power.
What to verify before purchase
- Exact voltage rating and polarity range
- Model number and revision
- Interlock and connector compatibility
Confirm with the seller
- Exact output rating due ambiguous title wording
- Exact supported ESC assembly
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.