Product description
Applied Materials 0190-33823 Advanced Energy Paramount 1513 RF generator, 1.5 kW 13.56 MHz, associated with model 3156310-015.
Specifications and identifiers
identification
| Supplier/model | Advanced Energy Paramount 1513 |
|---|
| Reported output | 1.5 kW |
|---|
| Reported frequency | 13.56 MHz |
|---|
| Associated model | 3156310-015 / 3156310-015A appears in evidence |
|---|
Applications
RF plasma generationESC or bias powerbeamline electromagnet powerheater/chamber drive circuitsRF plasma generationPVD/CVD/etch RF source powerProcess power supply replacement
How it works
A power supply, RF generator, chamber driver, or power measurement device used to deliver or monitor controlled energy in a semiconductor tool.
Power rating, frequency, voltage, output configuration, interlocks, and communication interface are critical for safe process operation.
Technical guide
RF generator
power source used to drive plasma loads
SCR controller
solid-state AC power control used for heater/driver circuits
magnet power supply
controlled current source for beamline or source magnet hardware
- MHz
- megahertz
- kW
- kilowatt
What to verify before purchase
- Verify exact output rating and input voltage
- Confirm connector/control interface
- Check RF output health, reflected-power history, and interlocks
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.