| Variants referenced | AX7685-20, AX7685-20-C, AX7685-20-R-C Confirm exact suffix on the unit being purchased or installed. |
|---|
| Vendor/family | MKS / ASTeX Astron |
|---|---|
| Model context | AX7685-20 |
| Function | Remote plasma source |
A remote plasma source generates plasma outside the main process chamber to create reactive species for chamber clean or process gas activation.
Remote plasma sources must match gas type, RF/power configuration, cooling, controls, and chamber interface hardware.
MKS/Astex Astron remote plasma source family referenced by the provided evidence.
Plasma generated remotely and delivered downstream to a chamber or gas path.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 5, 2026 16:21 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
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No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 1 | 18000.0000 | 18000.0000 | 18000.0000000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Feb 9, 2024 23:33 UTC | MKS ASTRON E/EX AX7685-20 REMOTE PLASMA SOURCE REV D 0190-34542 AMAT | Completed listing price | 3999.99 (currency not captured) | Not established |
| Apr 14, 2017 12:52 UTC | MKS Instruments AX7685-20-C Remote Plasma Source ASTRONex AMAT 0190-34542 Used | Completed listing price | 3509.13 (currency not captured) | Not established |
| Apr 13, 2017 19:29 UTC | ASTRON e/ex MKS Instruments AX7685-20 Plasma Source AMAT 0190-34542 Used Tested | Completed listing price | 3503.15 (currency not captured) | Not established |
| Jan 12, 2017 04:41 UTC | ASTRONex MKS Instruments AX7685-20 Plasma Source Rev. B AMAT 0190-34542 Used | Completed listing price | 3506.13 (currency not captured) | Not established |
| Oct 1, 2015 13:12 UTC | ASTRON e/ex MKS Instruments AX7685-20 Plasma Source AMAT 0190-34542 AS-IS | Completed listing price | 1280 (currency not captured) | Not established |
| Oct 1, 2015 13:12 UTC | ASTRON e/ex MKS Instruments AX7685-20 Plasma REV F Source AMAT 0190-34542 AS-IS | Completed listing price | 400 (currency not captured) | Not established |
| Sep 27, 2015 00:22 UTC | ASTRON e/ex MKS Instruments AX7685-20 Plasma REV F Source AMAT 0190-34542 AS-IS | Completed listing price | 500 (currency not captured) | Not established |
| Aug 31, 2015 01:35 UTC | ASTRON e/ex MKS Instruments AX7685-20 Plasma Source AMAT 0190-34542 AS-IS | Completed listing price | 1800 (currency not captured) | Not established |
| Apr 30, 2015 17:46 UTC | MKS Instruments AX7685-20 Remote Plasma Source ASTeX AMAT 0190-34542 Working | Completed listing price | 5506.13 (currency not captured) | Not established |
| Apr 30, 2015 17:31 UTC | MKS AX7685-20 Remote Plasma Source ASTRONex AMAT 0190-34542 Rev. B Used Working | Completed listing price | 8005.13 (currency not captured) | Not established |
| Feb 27, 2015 09:55 UTC | MKS Instruments AX7685-20 Remote Plasma Source AMAT 0190-34542 Used Working | Completed listing price | 3306.08 (currency not captured) | Not established |
| Jan 7, 2015 15:06 UTC | MKS Instruments AX7685-20-R-C Plasma Source ASTRONex AMAT 0190-34542 Refurbished | Completed listing price | 10003.1 (currency not captured) | Not established |
| May 23, 2014 15:06 UTC | MKS Instruments AX7685-20 Remote Plasma Source Astron e/ex AMAT 0190-34542 Used | Completed listing price | 5510.13 (currency not captured) | Not established |
| Apr 30, 2014 15:08 UTC | MKS Instruments AX7685-20-C Remote Plasma Source ASTRONex AMAT 0190-34542 Refurb | Completed listing price | 10003.1 (currency not captured) | Not established |
| Dec 25, 2013 07:02 UTC | MKS Instruments AX7685-20 Remote Plasma Source ASTRONex AMAT 0190-34542 As-Is | Completed listing price | 1923.68 (currency not captured) | Not established |
| Sep 5, 2013 15:33 UTC | MKS AX7685-20 Remote Plasma Source AMAT 0190-34542 Used Tested Not Working As-Is | Completed listing price | 3206.13 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Legacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayOriginal public listing price is shown separately from recorded accepted amounts.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Sep 1, 2026 18:12 UTC.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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