Product description
MKS/ASTeX AX8200A-CE ozone generator associated with Applied Materials part 0190-35870.
Specifications and identifiers
Identifying details
| Vendor/family | MKS ASTeX AX8200 / AX8200A-CE Vendor and model family repeatedly appear in the evidence. |
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| Function | Ozone generator Generates ozone for process use. |
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| Revision/marking | Rev A / CE mark reported Revision and CE marking appear in some source descriptions but should be verified on the unit. |
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Applications
ozone delivery systemsremote or integrated process gas generationApplied Materials process tool gas modulesOzone generation for process gas supplySemiconductor chamber cleaning or oxidation-related supportReplacement of ASTeX/MKS ozone generator module
How it works
An ozone generator produces ozone gas from oxygen for semiconductor process applications such as oxidation, cleaning, or deposition-support chemistry.
Ozone source condition and exact model are critical because gas-output capability, safety interlocks, and process compatibility can vary by configuration.
Technical guide
ozone_generation
High-voltage discharge or similar ozone-generation modules are commonly used to create ozone from oxygen; exact internal technology is not confirmed for this unit.
- AX8200A-CE
- ASTeX/MKS model designation reported in provided evidence
- CE
- European conformity marking when present
What to verify before purchase
- Verify the full model name on the nameplate, including AX8200A-CE or AX8200A-CE-R.
- Confirm operational condition, hours, generator cell condition, and safety/interlock compatibility.
Confirm with the seller
- Exact output rating, gas flow range, and tool compatibility are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.