0190-35870 / OZONE GENERATOR, HI-CON, CE MARK ASTEX AX8200A-CE-R / AMAT107-0201 AMAT APPLIED 0190-35870 (#2) MKS ASTEX AX8200A-CE OZONE GENERATOR ASIS107-0201 AMAT APPLIED 0190-35870 (#1) MKS ASTEX AX8200A-CE OZONE GENERATOR ASISApplied Materials AMAT  ASTEX AX8200 OZONE GENERATOR 0190-35870 REV A MKS (PARTSMINT CONDITION ASTEX AX8200A-CE AMAT GENERATOR  0190-35870107-0201 AMAT 0190-35870 (#1) MKS ASTEX AX8200A-CE OZONE GENERATOR [NOT WORKING]Astex AX8200 Ozone Generator, AMAT AX8200A 0190-35870, MKS, 414629Astex AX8200 Ozone Generator, AMAT AX8200A 0190-35870, MKS, 4146907420 APPLIED MATERIAL ASTEX OZONE GENERATOR P/N: 0190-35870 REV A AX8200A-CEAstex AX8200 Ozone Generator, AMAT AX8200A 0190-35870Astex AX8200 Ozone Generator, AMAT AX8200A 0190-35870
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APPLIED MATERIALS 0190-35870

Astex AX8200A-CE Ozone Generator

Market Availability & Pricing

Part number0190-35870
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales2100 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Process Equipment › Gas & Chemical Delivery › Ozone Generators
Astex AX8200A-CE Ozone Generator
APPLIED MATERIALS0190-35870Ozone generator
Product description
MKS/ASTeX AX8200A-CE ozone generator associated with Applied Materials part 0190-35870.
Specifications and identifiers
Identifying details
Vendor/familyMKS ASTeX AX8200 / AX8200A-CE
Vendor and model family repeatedly appear in the evidence.
FunctionOzone generator
Generates ozone for process use.
Revision/markingRev A / CE mark reported
Revision and CE marking appear in some source descriptions but should be verified on the unit.
Applications
ozone delivery systemsremote or integrated process gas generationApplied Materials process tool gas modulesOzone generation for process gas supplySemiconductor chamber cleaning or oxidation-related supportReplacement of ASTeX/MKS ozone generator module
How it works

An ozone generator produces ozone gas from oxygen for semiconductor process applications such as oxidation, cleaning, or deposition-support chemistry.

Ozone source condition and exact model are critical because gas-output capability, safety interlocks, and process compatibility can vary by configuration.

Technical guide
ozone_generation

High-voltage discharge or similar ozone-generation modules are commonly used to create ozone from oxygen; exact internal technology is not confirmed for this unit.

AX8200A-CE
ASTeX/MKS model designation reported in provided evidence
CE
European conformity marking when present
What to verify before purchase
  • Verify the full model name on the nameplate, including AX8200A-CE or AX8200A-CE-R.
  • Confirm operational condition, hours, generator cell condition, and safety/interlock compatibility.
Confirm with the seller
  • Exact output rating, gas flow range, and tool compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

0190-35870 / OZONE GENERATOR, HI-CON, CE MARK ASTEX AX8200A-CE-R / AMAT

0190-35870 / OZONE GENERATOR, HI-CON, CE MARK ASTEX AX8200A-CE-R / AMAT

USD 25242.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 29, 2024 19:00 UTC
End recorded: Dec 7, 2024 08:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 6, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
107-0201 AMAT APPLIED 0190-35870 (#2) MKS ASTEX AX8200A-CE OZONE GENERATOR ASIS

107-0201 AMAT APPLIED 0190-35870 (#2) MKS ASTEX AX8200A-CE OZONE GENERATOR ASIS

USD 20000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Aug 23, 2023 04:30 UTC
End recorded: Dec 7, 2024 10:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
107-0201 AMAT APPLIED 0190-35870 (#1) MKS ASTEX AX8200A-CE OZONE GENERATOR ASIS

107-0201 AMAT APPLIED 0190-35870 (#1) MKS ASTEX AX8200A-CE OZONE GENERATOR ASIS

USD 20000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Aug 21, 2023 08:00 UTC
End recorded: Dec 6, 2024 23:17 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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