AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG AMAT 0190-36184 SCRW DRIVE, 5-PH THROTTLE, VES SP21 NUT DP REV P2, 118001Applied Materials 0190-36006 Screw, Drive DPS Throttle Valve  A.K.A. 0190-36184Applied Materials 0190-36184 Screw, Drive DPS Throttle Valve  AMAT Centura DPSApplied Materials 0190-36184 Screw, Drive DPS Throttle Valve0190-36184, AMAT, SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG  AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG  AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG Applied Materials (AMAT) 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT
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APPLIED MATERIALS 0190-36184

Throttle Valve Drive Screw

Market Availability & Pricing

Part number0190-36184
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales997 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Motion & Actuation › Actuators & Drives
Throttle Valve Drive Screw
APPLIED MATERIALS0190-36184Throttle drive screw
Product description
Drive screw assembly for 5-phase throttle / DPS throttle valve use with VES SP21 nut reference.
Specifications and identifiers
identified features
Functiondrive screw for throttle valve
Drive context5-phase throttle / DPS throttle valve
Associated nut/referenceVES SP21 nut
Applications
load-lock mechanismsshuttersslit valves and wafer handlersThrottle valve drive mechanismDPS chamber vacuum control hardware
How it works

A motion or actuator assembly provides controlled mechanical movement for doors, shutters, valves, or wafer-handling mechanisms.

Actuator geometry and stroke are critical to repeatable motion and tool interlocks.

What to verify before purchase
  • Verify thread, travel length, nut style, and whether 0190-36006 cross-reference applies.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

 AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG

AMAT 0190-36184 SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT NEW SHIELD BAG

USD 997.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 16, 2025 22:26 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:09 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
AMAT 0190-36184 SCRW DRIVE, 5-PH THROTTLE, VES SP21 NUT DP REV P2, 118001

AMAT 0190-36184 SCRW DRIVE, 5-PH THROTTLE, VES SP21 NUT DP REV P2, 118001

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 24, 2023 15:30 UTC
End recorded: Dec 7, 2024 11:25 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0190-36006 Screw, Drive DPS Throttle Valve  A.K.A. 0190-36184

Applied Materials 0190-36006 Screw, Drive DPS Throttle Valve A.K.A. 0190-36184

USD 575.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 29, 2017 00:12 UTC
End recorded: Dec 7, 2024 02:54 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0190-36184 Screw, Drive DPS Throttle Valve  AMAT Centura DPS

Applied Materials 0190-36184 Screw, Drive DPS Throttle Valve AMAT Centura DPS

USD 995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 29, 2017 00:12 UTC
End recorded: Dec 7, 2024 02:54 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Applied Materials 0190-36184 Screw, Drive DPS Throttle Valve

Applied Materials 0190-36184 Screw, Drive DPS Throttle Valve

USD 895.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Dec 7, 2016 00:26 UTC
End recorded: Dec 7, 2024 01:35 UTC
Estimated remaining at check: 12
Estimated sold at check: 2

eBay response captured — Checked Oct 18, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
0190-36184, AMAT, SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT

0190-36184, AMAT, SCRW, DRIVE, 5-PH THROTTLE, VES SP21 NUT

USD 1400.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 16, 2016 22:42 UTC
End recorded: Dec 6, 2024 23:06 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 18, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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