0190-36754 / AX7658-AMAT-01-C REMOTE PLASMA SOURCE ASTRON2L REV. C / MKSMKS ASTEX 0190-36754 / AX7658-AMAT-01-C REMOTE PLASMA SOURCE ASTRON2L MKS ASTEX 0190-36754 / AX7658-AMAT-01-C REMOTE PLASMA SOURCE ASTRON2L MKS ASTEX 0190-36754 / AX7658-AMAT-01-C REMOTE PLASMA SOURCE ASTRON2L 0190-36754 REV. B/AX7658-AMAT-01-C REMOTE PLASMA SOURCE ASTRON2L ASTEX/ AMATAMAT 0190-36754 MKS ASTeX ASTRON 2L Remote Plasma Source AX7658-AMAT-01AMAT 0190-36754 MKS ASTeX ASTRON 2L Remote Plasma Source AX7658-AMAT-01AMAT 0190-36754 MKS ASTeX ASTRON 2L Remote Plasma Source AX7658-AMAT-01MKS ASTeX 2L RPS AX7658-AMAT-01 AMAT P/N 0190-36754AMAT 0190-36754 MKS ASTeX ASTRON 2L Remote Plasma Source AX7658-AMAT-01AMAT 0190-36754 MKS ASTeX ASTRON 2L Remote Plasma Source AX7658-AMAT-01AMAT 0190-36754 MKS Astex ASTRON2L Remote Plasma Source AX76580-AMAT-01AMAT 0190-36754 MKS Astex ASTRON2L Remote Plasma Source AX76580-AMAT-01AMAT 0190-36754 MKS Astex ASTRON2L Remote Plasma Source AX76580-AMAT-01/WarrantyAMAT 0190-36754 MKS Astex ASTRON2L Remote Plasma Source AX76580-AMAT-01MKS Instruments AX7658-AMAT-01 Remote Plasma Source ASTRON2L 0190-36754 CopperMKS Instruments AX7658-AMAT-01 Plasma Source ASTRON2L Rev. B 0190-36754 UsedMKS Instruments AX7658-AMAT-01 Remote Plasma Source ASTRON2L AMAT 0190-36754MKS Instruments AX7658-AMAT-01 Plasma Source ASTRON2L Rev. B 0190-36754 As-IsRPS MKS ASTRON 2L AX7658-AMAT-01, 0190-36754
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APPLIED MATERIALS 0190-36754

MKS ASTeX ASTRON 2L Remote Plasma Source

Market Availability & Pricing

Part number0190-36754
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported sales4999.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators & Plasma Sources
MKS ASTeX ASTRON 2L Remote Plasma Source
APPLIED MATERIALS0190-36754Remote plasma source
Product description
MKS ASTeX ASTRON 2L remote plasma source, AX7658-AMAT-01 / AX7658-AMAT-01-C
Specifications and identifiers
supported identifiers
OEM/modelMKS ASTeX ASTRON 2L
Repeated supported model family.
Model variantAX7658-AMAT-01 / AX7658-AMAT-01-C
Variant wording appears in evidence; verify nameplate.
FunctionRemote plasma source
Plasma generation module used away from the chamber reaction zone.
Applications
Remote plasma cleaningReactive gas activationCVD/etch chamber support systemsRemote plasma cleaningReactive gas activationCVD/etch chamber support systems
How it works

A remote plasma source generates plasma remotely, commonly for chamber cleaning or reactive gas activation.

Matching the source model, revision, RF/power interface, and gas delivery setup is important for safe operation.

Technical guide
RPS
Remote Plasma Source
What to verify before purchase
  • Confirm model suffix, revision, power requirements, gas ports, cooling requirements, and service condition.
Confirm with the seller
  • Exact installed tool model, revision interchangeability, and process compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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