Product description
Comet automatic RF matching network, 2000 W, 5000 V, 50 A, 13.56 MHz, associated with Applied Materials part 0190-40238.
Specifications and identifiers
identified features
| Function | RF match / matching network Supported by both descriptions. |
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| Vendor/model | Comet 20054998 Supported by evidence. |
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| Power rating | 2000 W Supported by one description. |
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| Voltage/current | 5000 V / 50 A Supported by one description. |
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| Frequency | 13.56 MHz Supported by one description. |
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Applications
plasma etch systemsCVD plasma systemsRF power deliveryRF plasma power matchingetch/CVD RF power delivery
How it works
An RF matching network tunes the impedance between an RF generator and a plasma load.
Power rating, frequency, voltage/current limits, connector style, and control interface must match the RF system.
Technical guide
- 13.56 MHz
- Common industrial RF plasma frequency.
- Comet
- RF power/matching-network vendor indicated by provided evidence.
- RF match
- Network that tunes impedance between an RF generator and plasma/chamber load.
What to verify before purchase
- Verify exact OEM part number, revision, connector or fitting configuration, and tool compatibility before installation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.