Product description
Tokyo Keiso AFC-8000-T2104-052-P-003 flow controller, used as an Applied Materials slurry flow controller.
Specifications and identifiers
part attributes
| Vendor | Tokyo Keiso Vendor name repeatedly appears. |
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| Model | AFC-8000-T2104-052-P-003 Repeated model identifier. |
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| Application wording | Slurry flow controller Product/application attribute. |
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| Tool clue | Mirra Included in one product note and is a CMP platform association to verify. |
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Equipment context
- Applied Materials Mirra CMP
Applications
equipment control rackschamber interface wiringmotion or robot controltool communicationsslurry flow controlCMP fluid deliveryprocess fluid metering
How it works
An electronic board, controller, or interface module used inside a semiconductor tool control system.
These assemblies support tool I/O, motion, communications, power control, or module-level control; revision and configuration often matter.
Technical guide
pcb
Printed circuit board assemblies combine components, connectors, and firmware or configuration-dependent functions.
- I/O
- Input/output signals used for sensors, actuators, interlocks, and tool control.
What to verify before purchase
- Confirm wetted materials and slurry compatibility.
- Verify calibration/range and electrical interface.
- Confirm exact AFC model suffix and connector configuration.
Confirm with the seller
- Exact flow range is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.