Product description
Inficon CG100 capacitance gauge / vacuum gauge, 100 Torr range, Applied Materials 0190-51281.
Specifications and identifiers
identification
| Supported vendor/model | Inficon CG100 |
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| Gauge type | Capacitance gauge / vacuum gauge |
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| Range | 100 Torr Range is strongly supported but should be verified on the gauge label. |
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revision context
| Observed revisions | Rev 02 and Rev 03 are referenced Revision can matter for connector, calibration, and tool configuration. |
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Applications
vacuum chambersload locksgas delivery systemsprocess pressure monitoringProcess pressure measurementVacuum chamber pressure monitoringReplacement capacitance gauge/transducer
How it works
A vacuum gauge is a sensor used to measure gas pressure in a chamber, foreline, or process gas path.
Pressure measurement affects process control, pumpdown verification, leak checks, and safety interlocks.
Technical guide
wetted_surfaces
Wetted materials and fitting style must be verified for process compatibility.
capacitance_gauge
Capacitance diaphragm gauges measure pressure by diaphragm deflection and are valued for process pressure accuracy.
thermal_conductivity_gauge
Convectron-style gauges infer pressure from gas thermal conductivity and are commonly used over rough/medium vacuum ranges.
- Torr
- A pressure unit commonly used in vacuum systems.
What to verify before purchase
- Verify pressure range, fitting size, connector, output signal, calibration status, and revision.
- Confirm whether the installed tool expects Inficon CG100 or an equivalent AMAT-numbered gauge.
Confirm with the seller
- Exact connector, output type, and calibration status are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.