Product description
Applied Materials 0190-76244 chamber driver / SCR power controller for PVD dual-zone HTESC, 120 VAC context.
Specifications and identifiers
identification
| Function | PVD dual-zone HTESC chamber driver |
|---|
| Electrical context | 120 VAC appears in evidence |
|---|
| Alternate type | SCR power controller appears in evidence |
|---|
Applications
RF plasma generationESC or bias powerbeamline electromagnet powerheater/chamber drive circuitsHTESC heater/chamber driverPVD dual-zone controlSCR power control replacement
How it works
A power supply, RF generator, chamber driver, or power measurement device used to deliver or monitor controlled energy in a semiconductor tool.
Power rating, frequency, voltage, output configuration, interlocks, and communication interface are critical for safe process operation.
Technical guide
RF generator
power source used to drive plasma loads
SCR controller
solid-state AC power control used for heater/driver circuits
magnet power supply
controlled current source for beamline or source magnet hardware
- MHz
- megahertz
- kW
- kilowatt
What to verify before purchase
- Verify input voltage and phase
- Confirm output channels and control interface
- Check exact HTESC/chamber compatibility
Confirm with the seller
- Exact tool/chamber compatibility is not confirmed
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.