Product description
Mass flow controller (MFC), 3000 sccm hydrogen service callout, for Applied Materials
Specifications and identifiers
supported identity
| item noun | Mass flow controller / MFC Gas flow control device. |
|---|
| flow range | 3000 sccm Repeated in evidence; verify calibration label. |
|---|
| gas | H2 Hydrogen service/calibration callout appears; verify before use. |
|---|
Applications
process gas deliverycarrier gas controlpurge and deposition gas meteringHydrogen process gas flow controlGas panel MFC replacement
How it works
A mass flow controller or flow controller meters gas flow for a process line.
Gas type, full-scale range, fittings, calibration gas, and communication protocol determine compatibility.
Technical guide
wetted_path
Material and seal compatibility must be confirmed for the intended gas.
MFC/MFM
Mass flow control or measurement for process gases.
- MFC
- mass flow controller
- SLM
- standard liters per minute
- sccm
- standard cubic centimeters per minute
What to verify before purchase
- Verify calibration gas and full-scale range from label
- Confirm fittings and communication protocol
- Leak test before service
Confirm with the seller
- Exact vendor/model
- DeviceNet/analog interface
- Wetted materials
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.