Product description
Praxair ampoule bubbler / welded-valve 3 liter stainless ampoule for Applied Materials FlexStar 2G chamber context.
Specifications and identifiers
ampoule identity
| Supplier context | Praxair |
|---|
| Function | Ampoule bubbler |
|---|
| Volume context | 3 liter |
|---|
| Material context | Stainless steel |
|---|
tool context
| Referenced chamber | FlexStar 2G |
|---|
valve context
| Valve configuration | Welded valves |
|---|
Applications
CVD precursor deliveryGas/chemical delivery modulesAmpoule manifold assembliesPrecursor ampoule/bubbler replacementCVD chemical delivery component
How it works
An ampoule bubbler holds and delivers liquid or solid precursor material through a controlled gas flow path.
Material compatibility, valve configuration, volume, cleanliness, pressure rating, and prior contents are critical for safe use.
Technical guide
SST
Stainless steel, commonly used for chemical/gas wetted parts.
bubbler
Carrier gas passes through or over precursor to entrain vapor for delivery.
- FlexStar
- Tool/chamber context referenced by the provided evidence.
- Praxair
- Supplier name referenced by the provided evidence.
What to verify before purchase
- Verify prior contents, cleanliness, pressure rating, valve type, fittings, and certification before any chemical service.
- Confirm 3 L volume and FlexStar 2G compatibility from nameplate/BOM.
Confirm with the seller
- Exact chemical service and pressure rating are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.