Product description
Novellus heater pedestal assembly, Type D, 200mm, standard semi, approximately 9 inch diameter.
Specifications and identifiers
dimensions and configuration
| Wafer size | 200mm Wafer class for the pedestal. |
|---|
| Type | Type D / STD SEMI Configuration descriptors to verify. |
|---|
| Diameter | 9 inch Approximate diameter descriptor shown. |
|---|
Applications
CVD or deposition chambersheated wafer supportNovellus chamber maintenanceHeater pedestal replacement200mm chamber repairThermal process support
How it works
A heater pedestal supports and heats the wafer or process area in a semiconductor chamber.
Pedestal dimensions, heater function, and surface condition directly affect thermal uniformity and wafer placement.
Technical guide
heater pedestal
Integrated support/heater component for wafer thermal control.
- AMAT
- Common abbreviation for Applied Materials.
- ASSY
- Assembly.
- PCB
- Printed circuit board.
- PWB
- Printed wiring board; often used interchangeably with PCB.
- REV
- Revision level; confirm against the required tool configuration.
What to verify before purchase
- Confirm Type D and standard-semi configuration.
- Inspect heater continuity, thermocouple connections, surface condition, and ceramic/metal integrity.
Confirm with the seller
- Exact process module is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.