02-113640-00 / SYSTEM CONTROLLER, P166, P164 / NOVELLUS33333 NOVELLUS ASSY, SYS CONT, P166/64 02-113640-00Novellus 02-113640-00 MCI Controller SYST CONT P166/64 Rev. C Concept Two SpareNovellus 02-113640-00 Assy SYS CONT P166/64 System Control Working!Novellus 02-113640-00 System Controller ASSY, SYS CONT, P166/64 AS-IS UntestedNovellus 02-113640-00 P166/64 Industrial Assembly System Controller ModuleNovellus 02-113640-00 P166/64 Industrial Assembly System Controller ModuleNovellus 02-113640-00 P166/64 Industrial Assembly System Controller ModuleNovellus 02-113640-00 P166/64 Industrial Assembly System Controller ModuleNovellus 02-113640-00 P166/64 Industrial Assembly System Controller ModuleNovellus 02-113640-00 Assy SYS CONT P166/64 System Control Working!Novellus 02-113640-00 P166/64 System Controller Assembly working
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NOVELLUS 02-113640-00

P166/64 System Controller Assembly

Market Availability & Pricing

Part number02-113640-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales2802.2 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Control › Boards & Controllers › Semiconductor Equipment Controls
P166/64 System Controller Assembly
NOVELLUS02-113640-00System controller module
Product description
Novellus 02-113640-00 system controller assembly, described as SYS CONT P166/64 / P166 or P164 industrial controller module.
Specifications and identifiers
identification
FunctionSystem controller
CPU/configurationP166/64; P164/P166 wording appears in evidence
Revision noteRev C appears in evidence
Equipment context
  • Novellus Concept Two
Applications
semiconductor equipment control cabinetsdistributed I/O and sensor interfacesrobot, chamber, or process-module controlsNovellus system controller replacementIndustrial control module serviceConcept Two / tool control computer spare
How it works

A printed circuit board assembly used for tool control, sensing, interlock, or distributed I/O functions.

Correct board revision, firmware, and connector/interface compatibility determine whether the tool communicates and interlocks correctly.

Technical guide
PCB/PCBA

printed circuit board or board assembly

I/O
input/output signals between controllers and field devices
What to verify before purchase
  • Confirm CPU/RAM configuration and revision
  • Verify BIOS/storage/interface requirements
  • Test boot and I/O communication before installation
Confirm with the seller
  • Exact Novellus platform and configuration are not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

No image available

02-113640-00 / SYSTEM CONTROLLER, P166, P164 / NOVELLUS

USD 2053.34

Legacy public listing price; currency may not have been captured.

Legacy active status; availability unknown
US
Condition: Used
Listed: Nov 6, 2026 15:45 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

View on eBay
02-113640-00 / SYSTEM CONTROLLER, P166, P164 / NOVELLUS

02-113640-00 / SYSTEM CONTROLLER, P166, P164 / NOVELLUS

USD 2231.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Apr 16, 2025 17:08 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
33333 NOVELLUS ASSY, SYS CONT, P166/64 02-113640-00

33333 NOVELLUS ASSY, SYS CONT, P166/64 02-113640-00

USD 2940.00

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jul 18, 2023 06:02 UTC
End recorded: Dec 7, 2024 04:29 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 25, 2026 11:13 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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