Lam Research 02-376090-00 PED Assembly Machined Finish C3VCTR Used WorkingLAM RESEARCH 02-376090-00 PED ASSY STA2-4,1" MCA, NO LIFT HOSE MACHLam Research 02-376090-00 15" Heater Pedestal C3VCTR Copper Exposed Working
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NOVELLUS 02-376090-00

Heater Pedestal Assembly, C3VCTR

Market Availability & Pricing

Part number02-376090-00
ManufacturerNOVELLUS
Current availabilitySee listings below
Latest completed listing with reported sales1503.18 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Chamber Components › Heated Pedestals
Heater Pedestal Assembly, C3VCTR
NOVELLUS02-376090-00heater pedestal assembly
Product description
Assy heater pedestal / heater pedestal assembly, C3VCTR; listed as 300 mm / 15 inch and Revision A in some sources
Specifications and identifiers
evidence fields
Item nounHeater pedestal assembly
Repeated evidence.
Platform/contextC3VCTR / Concept 3 Vector
Repeated context term.
Size/revision references300 mm / 15 inch; Revision A
Appears in several titles but should be verified.
Equipment context
  • Lam Research C3VCTR / Concept 3 Vector
Applications
Lam C3VCTR / Concept 3 Vector context300 mm process chamber hardwareheated wafer support assembliesheated wafer pedestalprocess chamber wafer support and heating
How it works

A heater pedestal assembly supports and heats a wafer or chamber process position.

Pedestal condition, surface integrity, revision, and heater electrical health directly affect process uniformity and tool safety.

Technical guide
300 mm / 15 inch
Size context from evidence.
C3VCTR
Likely Concept 3 Vector shorthand from listings.
PED
Pedestal abbreviation.
What to verify before purchase
  • Verify revision, heater resistance, insulation resistance, thermocouple/sensor status, and connector condition.
  • Inspect top surface, coating, cracks, exposed copper, and mounting features.
  • Confirm exact chamber/platform compatibility.
Confirm with the seller
  • Electrical specs are not provided.
  • Interchangeability among revisions is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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Prices and availability may change. Confirm details with the seller.

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