Product description
Cover, 8 inch pedestal, B101 heater, ceramic/aluminum; also described as an arc-sprayed 8 inch pedestal cover.
Specifications and identifiers
part attributes
| Nominal size | 8 inch Size is associated with the pedestal cover. |
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| Function area | Pedestal cover Covers or protects the wafer-support pedestal area. |
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| Construction terms | Ceramic, aluminum, arc-sprayed Material/coating terms included in the supported product notes. |
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| Process/module clue | B101 HTR Likely heater/pedestal-related wording; exact platform should be verified. |
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Equipment context
- B101 heater/pedestal module
- Applied Materials process chamber
Applications
process chamberspedestal and wafer support areasgas distribution and pumping pathsPVD/CVD chamber kitspedestal protectionprocess chamber hardware replacementheater/pedestal cover service
How it works
A chamber or process-module hardware component used around the wafer, pedestal, plasma, gas distribution, or chamber body area.
Geometry, material, coating, wafer size, and process family are critical because these parts affect plasma exposure, thermal behavior, contamination control, and mechanical fit.
Technical guide
Vespel
A high-performance polyimide used for selected high-temperature or low-outgassing hardware.
ceramic
Ceramic parts are common in plasma-facing or high-temperature regions because of electrical insulation and process resistance.
quartz
Quartz is used where optical transmission, thermal behavior, or chemical cleanliness is important.
sapphire
Sapphire windows or lenses are used where optical transmission and hardness are needed.
- ESC
- Electrostatic chuck, a wafer-holding assembly that uses electrostatic force.
What to verify before purchase
- Confirm exact revision and coating condition.
- Verify whether the installed part requires the ceramic/aluminum version or another pedestal-cover variant.
- Inspect arc-sprayed surfaces for wear or flaking before reuse.
Confirm with the seller
- Exact tool model compatibility is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.